تعیین سطح انرژی پتانسیل بین مولکولی سامانه nf3-nf3 با روش از اساس و محاسبه ضریب دوم ویریال گاز nf3

تعیین سطح انرژی پتانسیل سامانه cs2-cs2 به روش از اساس و محاسبه ضریب دوم ویریال

امروزه شیمی محاسباتی، ساختار ، خواص مولکول ها و واکنش های شیمیایی را به دو روش نظری ساختار الکترونی و مکانیک مولکولی بر اساس قوانین فیزیکی به صورت عددی شبیه سازی می کند. بر این اساس، در این تحقیق با استفاده از روش ساختار الکترونی یک سطح انرژی پتانسیل چهار بعدی برای سامانه cs2-cs2 با محاسبات از اساس، انرژی برهم کنش برای پیکربندی های مختلف به دست آمده است. برای این کار از روش ابر مولکول و سطح محا...

Remote plasma sources sustained in NF3 mixtures

Remote plasma sources (RPS) are being developed for low damage materials processing during semiconductor fabrication. Plasmas sustained in NF3 are often used as a source of F atoms. NF3 containing gas mixtures (e.g., NF3/O2, NF3/H2) provide the additional opportunity to produce and control desirable F atom containing reactive species. In this paper, results from computational investigations of ...

Cross Sections for Electron Collisions with NF3

Silicon etching in NF3/O2 remote microwave plasmas

The etching of silicon in remote microwave discharges fed with NF3 /O2 has been investigated. In situ ellipsometry and x-ray photoelectron spectroscopy ~XPS! were used to monitor surface effects, while mass spectrometry was used to monitor the gas phase dynamics. Varying the microwave power from 600 to 1400 W has little effect, due to the near complete dissociation of the NF3, even at lower pow...

Insights to scaling remote plasma sources sustained in NF3 mixtures

Remote plasma sources (RPSs) are being developed for low damage materials processing during semiconductor fabrication. Plasmas sustained in NF3 are often used as a source of F atoms. NF3 containing gas mixtures such as NF3/O2 and NF3/H2 provide additional opportunities to produce and control desirable reactive species such as F and NO. In this paper, results from computational investigations of...

Proteinases in Naegleria Fowleri (strain NF3), a pathogenic amoeba: a preliminary study.

Naegleria fowleri is a free-living amoeba, known as a causative agent for a fatal disease of the central nervous system (CNS) in man such as Primary amoebic meningoencephalitis (PAM). Factors contributing to its pathogenicity and its distribution in the environment have been investigated by previous researchers. In case of its pathogenicity, several enzymes such as phospolipase A and sphingomye...